EENG 4450 - Micro-Electro-Mechanical-Systems (MEMS)

3 hours (3;3)

Designed to provide an introduction to conventional micro-electro-mechanical systems (MEMS). Begins with an overview of the semiconducting properties of silicon, the workhorse of the microelectronics industry. The impact of continued miniaturization on transistor performance is highlighted according to Moore’s Law. Moving from Silicon as an electronic material, its mechanical properties are discussed which has been pivotal in the creation of the field of MEMS. A review of microfabrication technology conventionally used to form MEMS structures and devices using batch-fabrication is provided, which includes topics such as: photolithography, etching, physical vapor deposition, chemical vapor deposition, surface micromachining and bulk micromachining. Soft materials and thick film processes are also discussed that have been key enablers for microfluidics and BioMEMS. The practical applications of MEMS for sensors and actuators are highlighted, where electrostatic, thermal, piezoelectric and magnetic transduction schemes are used for actuation and sensing, including for RF wireless systems and bio-related applications for Lab-on-Chip (LOC). Students gain a broad perspective in the area of miniaturized systems for sensors and actuators. The laboratory modules are intended to reinforce the concepts discussed in the lectures, with practical hands-on learning exercises. The lectures and accompanying lab modules will help cultivate interdisciplinary perspectives with hands-on exercises developed for the students.

Recommended: PHYS 1710, CHEM 1410/CHEM 1430 or CHEM 1415/CHEM 1435 or equivalent.

Course specific fees (in addition to tuition and mandatory):
Academic (AF) per hour: $52.70